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electron beam physical vapor deposition中文是什么意思

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Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase.
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Last modified time:Tue, 12 Aug 2025 00:29:56 GMT

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